The interference measuring lens can be used in non-contact optical profiling measurement equipment, through which the surface bitmap and surface measurement parameters can be obtained. It can also be used to detect the surface roughness with high measurement accuracy within one wavelength. A beam of light passes through the spectroscope, which can direct the light to the sample surface and the built-in reflector. The light reflected from the surface of the sample is recombined to produce interference patterns. Compared with Mirau lens, Michelson lens has longer working distance, wider field of view and larger depth of field. Mirau lenses are used where high magnification and / or large numerical aperture are required. When Nikon 200 mm lens barrel is used, the lens can be directly assembled to the C-interface camera.
Depth of field (μm)
Horizontal field of view, 1 / 2 "sensor
Horizontal field of view, 2 / 3 "sensor
Field of view, 20 diameter field of view eyepiece (mm)
Field of view, 25 diameter field of view eyepiece (mm)
focal length (mm)
M27 x 0.75
Working distance (mm)
Nikon 200 mm tube mirror
Long working distance and large numerical aperture value Na
High contrast and z-flare
Nikon cfi60 is a good optical technology of Nikon, which meets the advanced imaging requirements. Due to the use of a 60mm focal length and a larger diameter, the Nikon cfi60 infinity corrector objective can provide higher brightness, limited working distance and numerical aperture NA (concentrating power). The objective is to correct the transverse and axial chromatic aberration in the whole field of view, so as to obtain the image with high contrast and high resolution.
The Nikon lens can be used to focus the beam from the far-field correction lens to the image plane. Due to the optical performance, it should be kept between 100-200 mm from the lens barrel to the positioning position of the objective lens, so that the space can allow this accessory to be inserted into the optical path and meet the parameter requirements. This tube mirror can be integrated into the C-interface system by fixing the Nikon tube mirror to the C-interface mount.